Static Pull-In Behavior of Hybrid Levitation Microactuators: Simulation, Modeling, and Experimental Study

In this article, a systematic and comprehensive approach based on finite element analysis analytical modeling for studying static pull-in phenomena in hybrid levitation microactuators is presented. A model of electromagnetic the Lagrangian formalism formulated developed as result recent progress calculation mutual inductance between filament loops. particular, allows us to calculate accurately efficiently distribution induced eddy current within levitated micro-object. At same time, fact provides reason formulating which can be approximated by one circuit represented circular filament. turn, both models predict parameters without needs solving nonlinear differential equations. The results obtained means quasi-finite are verified comparison with experimental results.